| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing waste liquid treatment apparatus that can discharge air accumulated in an ion exchange resin cylinder without sending the air to a processing apparatus, when exchanging the ion exchange resin cylinder. <P>SOLUTION: The processing waste liquid treatment apparatus includes: a waste liquid storage tank; a waste liquid filtration means refining the processing waste liquid by filtering the same; a fresh water storage tank that stores fresh water refined by the waste liquid filtration means; a pure water generation means that includes the ion exchange resin cylinder that stores ion exchange resin for refining the fresh water into the pure water; and a processing liquid supplying means supplying the pure water refined by the pure water generation means to the processing apparatus. A pure water sending pipe that connects the ion exchange resin cylinder of the pure water generation means to the processing liquid supplying means is connected to the fresh water storage tank with an air discharging pipe, an opening/closing valve is disposed in the air discharging pipe, and an opening/closing valve is disposed at the processing liquid supplying means side from a connection part with the air discharging pipe at the pure water sending pipe that connects the ion exchange resin cylinder to the processing liquid supplying means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
