| 摘要 |
PURPOSE: A collecting apparatus of ammonia from waste liquid in a nitrogen trifluoride gas manufacturing process and a method for the same are provided to conserve raw materials needed for the ammonia. CONSTITUTION: A collecting method of ammonia from waste liquid in a nitrogen trifluoride gas manufacturing process includes the following steps: ammonia and moisture are removed from waste liquid, generated from an ammonia gas manufacturing process by contacting the waste liquid with a heat medium in an ammonia stripper(10); the ammonia and the moisture is condensed in a condenser(30); the liquefied ammonia and moisture is temporarily stored in the state of an ammonia aqueous solution using a buffer tank(40); the ammonia aqueous solution is stored in a storing tank(50); and a scrubber(60), connected to the buffer tank and an exhaust line(46), absorbs ammonia gas which is vaporized from the buffer tank. [Reference numerals] (AA) Waste liquid(containing NH_3); (BB,CC) Coolant; (DD) 25wt% NH_3 aqueous solution; (EE) Refining NH_3; (FF) Heating medium
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