ACTIVE SPECIES GENERATING UNIT

摘要

PROBLEM TO BE SOLVED: To stably generate active species as a result by restricting deterioration in a discharge electrode since discharge is performed by distribution from the wide range of the discharge electrode.

SOLUTION: An active species generating unit comprises: a body case 6; a plate-shaped insulating substrate 16 that is arranged inside the body case 6; a bar-shaped discharge electrode 17 that is disposed to face one surface of the insulating substrate 16; a counter electrode 19 provided in contact with the insulating substrate 16; and a power source 20 that applies voltage to the discharge electrode 17 and the counter electrode 19. The insulating substrate 16 includes a hole 21 and an absorption means 18 that absorbs moisture to the inner surface of the hole 21 and the one front surface of the insulating substrate 16. The distal end of the discharge electrode 17 is positioned at substantially the center within the hole 21.

COPYRIGHT: (C)2013,JPO&INPIT