| 发明名称 |
METHOD OF CONTROLLING QUALITY OF WORKING LIQUID SUPPLY NOZZLE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of controlling quality of a working liquid supply nozzle for quantitatively controlling the quality of the working liquid supply nozzle. <P>SOLUTION: The method is used to control the quality of the working liquid supply nozzle for supplying a working liquid to a workpiece, and it includes: a jetting step for supplying a working liquid to the working liquid supply nozzle and jetting it from a working liquid jetting port; an imaging step for picking up an image of the working liquid jetted from the working liquid jetting port by an imaging means and forming a pick-up image; and a determination step for determining the quality of the working liquid supply nozzle based on the pick-up image formed in the imaging step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2012218102(A) |
申请公布日期 |
2012.11.12 |
| 申请号 |
JP20110085633 |
申请日期 |
2011.04.07 |
| 申请人 |
DISCO CORP |
发明人 |
NAGAMATSU JUN;NIIJIMA KATSUHIRO;SATO MASAMI |
| 分类号 |
B24B55/02;B23Q11/10;H01L21/301 |
主分类号 |
B24B55/02 |
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