| 摘要 |
PURPOSE: A Ti-In-Zn-O transparent electrode, a metal-inserted three-layer transparent electrode with high electric conductivity using the same, and a manufacturing method thereof are provided to produce transparent electrodes with low surface resistance and high electric conductivity and transmissivity for a dye-sensitive solar cell at normal or low temperatures. CONSTITUTION: A method for manufacturing a Ti-In-Zn-O transparent electrode for a flexible dye sensitive solar cell comprises the steps of : preparing a flexible transparent substrate(S100) and simultaneously depositing Ti and IZO on the substrate or forming a Ti-In-Zn-O thin film using a single Ti-In-Zn-O target(S200), wherein the transparent substrate is one selected from the group consisting of polyethersulphone, polyacrylate, polyetherimide, polyethyelenennapthalate, polyethyeleneterepthalate, polyphenylene sulfide, polyallylate, polyamid, polyimide, polycarbonate, cellulose triacetate, and cellulose acetate propinonate. [Reference numerals] (S100) Step of preparing a flexible transparent substrate; (S200) Step of simultaneously depositing Ti and IZO on the substrate; (S300) Step of manufacturing a transparent electrode of a three-layered TiIZO/metal/TiIZO structure |
