| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chip recovery device capable of reducing dissipated amount of gas in an existing gas pipe into the atmosphere and simply performing a chip recovery work. <P>SOLUTION: This chip recovery device includes: a pipe body 2 extending in the vertical direction and connected to a gate valve 12; a flange 3 mounted at an upper end part 2a of the pipe body 2; a chip attraction means 4 which is formed into a rod shape penetrating into the flange 3 and in which a magnet part 5 capable of attracting chip 20 is mounted at a lower end part 4b and the position of the magnet part 5 can be operated by operating an upper end part 4a side; a chip storage part 6 provided in the pipe body 2 to store the chip 20 attracted by the magnet part 5; and an observation window 7 formed in the flange 3 to observe a lower side from the above of the flange 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
