| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lamp unit capable of having a uniform illumination intensity distribution and forming patterns with high resolution, which are accurate to patterns of a mask, and a light irradiation device having the lamp unit. <P>SOLUTION: The lamp unit 10 is made of a plurality of light source element rows 11a, 11b, wherein a plurality of light source elements 12 made from short-arc type discharge lamps and reflectors are arranged as one light source element row by lining up in one direction. The light source elements 12 on the light source element row 11a and the light source element row 11b are arranged on positions mutually shifted in a slanting direction against an X direction (a lining-up direction of the light source element rows), and uniformity on a light quantity distribution in a light irradiation range formed on an irradiated surface with light emitted from the entire lamp unit 10 can be improved. Further, light quantity compensation plates 25a, 25b are arranged at light emitting sides of the light source element rows 11a, 11b, and uniformity of an integrated light quantity of the lamp unit can be compensated by decreasing the light quantity in the vicinity of the top in the light quantity distribution of the light emitted from respective light source elements 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
