| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the service life and yield of an acceleration sensor. <P>SOLUTION: A main body 1 includes a box-like frame part 1a, one side of which is opened, and a movable part 1b located inside a side wall portion 1a1 thereof. The movable part 1b is mounted rotatably on a pair of beams 1c as a rotation shaft which connects between the both sides of the movable part 1b and insides of the side face of the frame part 1a. The movable part 1b is provided with a movable electrode 6 at a first fixed board 2 side thereof. The first fixed board 2 is provided, at both sides of the rotation shaft in plan view, with first and second fixed electrodes 4A and 4B facing the movable electrode 6. Defining an area of the first fixed board 2, which is located between the first fixed electrode 4A and the second fixed electrode 4B in plan view, as a space portion 7A; and an area of the movable part 1b, which faces the space portion 7A, as a space-facing portion 7B, at least one of the space portion 7A and the space-facing portion 7B has a concave portion 8 formed therein. <P>COPYRIGHT: (C)2013,JPO&INPIT |
