发明名称 COPPER BONDING WIRE
摘要 <P>PROBLEM TO BE SOLVED: To provide a copper bonding wire which can be sufficiently bonded at an initial stage in an opening of an aluminum electrode without damaging a dielectric film of a lower part of the aluminum electrode by impact generated when a ball comes into contact with the aluminum electrode at the bonding time, and furthermore without crushing the ball into a pedal shape too much. <P>SOLUTION: A copper bonding wire contains copper as a main component, and sulfur of 0.1 mass ppm or more and 3 mass ppm or less and palladium of 400 mass ppm or more and 5000 mass ppm or less are added thereto. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012222194(A) 申请公布日期 2012.11.12
申请号 JP20110087299 申请日期 2011.04.11
申请人 SUMITOMO METAL MINING CO LTD 发明人 TOGASHI AKIRA
分类号 H01L21/60 主分类号 H01L21/60
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