| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a proton conductor film having high crystallinity without oxidizing a substrate consisting of Pd that is a hydrogen permeable metal. <P>SOLUTION: The formation method of a proton conductor film represented by BaZr<SB POS="POST">1-x</SB>Y<SB POS="POST">x</SB>O<SB POS="POST">3</SB>(0.3≥x≥0) includes a step for adjusting an aqueous solution containing Ba<SP POS="POST">2+</SP>,Zr<SP POS="POST">4+</SP>Y<SP POS="POST">3+</SP>, a step for adjusting a precursor solution by adding KOH to the aqueous solution thereby adjusting the pH, and a step for forming a film under hydrothermal conditions by holding the substrate in the precursor solution subjected to pH adjustment. In particular, a proton conductor film having high crystallinity can be formed by forming it after forming an NiO film on the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
