| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of accurately managing diaphragm replacement timing in a fluid controller by a simple structure, and easily adaptable even with respect to an existing fluid controller. <P>SOLUTION: The fluid controller includes: a valve body having an inlet passage and an outlet passage; a diaphragm allowing or blocking communication of a fluid from the inlet passage to the outlet passage; an operation mechanism for operating the diaphragm; and a bonnet holding the diaphragm with the valve body. An index member capable of detecting by visual observation that a projecting amount of the diaphragm from a side face of the bonnet has become a certain value or more is attached to the bonnet. <P>COPYRIGHT: (C)2013,JPO&INPIT |
