SUBSTRATE HOLDING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND COMPUTER READABLE RECORDING MEDIUM WITH SUBSTRATE PROCESSING PROGRAM RECORDED

摘要

PROBLEM TO BE SOLVED: To allow accurate determination of whether a holding state of a substrate is good or bad without influence by the material and surface state of the substrate and the like.

SOLUTION: A substrate holding device comprises: substrate holding means (30) for holding a substrate (2); substrate pressing means (30) for pressing the substrate (2) held by the substrate holding means (30); substrate detection means (25) for detecting the substrate (2) held by the substrate holding means (30); and control means (27) for controlling the substrate holding means (30), the substrate pressing means (30), and the substrate detection means (25). The control means (27) detects the state of the substrate (2) by the substrate detection means (25) while holding the substrate (2) by the substrate holding means (30) and uses the detected state as an initial value and then detects the state of the substrate (2) by the substrate detection means (25) while pressing the substrate (2) by the substrate pressing means (26) and uses the detected state as a comparison value. Then the control means compares the initial value with the comparison value and determines whether the holding state of the substrate (2) by the substrate holding means (30) is good or bad.

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