| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method which joins an amorphous metallic member to a metallic joined member without heating. <P>SOLUTION: Both the joined member 31 and the amorphous metallic member 32 are arranged in a vacuum chamber 1 having low pressure of 10<SP POS="POST">-4</SP>Pa or less, and, by colliding ions each other, or radiating plasma on respective joint surfaces, so that the surfaces are etched, for example, oxide films 4, 4 are removed, thus, a surface activation step in which activated atoms are expressed, is performed (Fig.1(A)). Afterwards, a polymerization pressurization step, in which the joint surfaces of the joined member 31 and the amorphous metallic member 32 are overlapped each other in the vacuum chamber 1, where vacuum is kept, and are pressurized, is performed (Fig.1(C)). In this way, joining is performed. The joining is performed by keeping the amorphous member 32 in temperature less than its melting point, preferably, keeping it in temperature less than crystallization temperature. <P>COPYRIGHT: (C)2013,JPO&INPIT |
