发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting device which prevents the occurence of scratches and corrosion on a cutting blade attachment surface of a spindle and properly transmits supersonic vibrations to the cutting blade. <P>SOLUTION: A cutting device includes: a chuck table holding a work piece; cutting means having a cutting blade attached to a tip surface of a spindle rotatably driven; supersonic vibration providing means providing supersonic vibrations to the cutting blade; and moving means relatively moving the cutting means and the chuck table. At least the tip surface of the spindle to which the cutting blade is attached is coated by an anti-corrosion agent. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012222221(A) 申请公布日期 2012.11.12
申请号 JP20110088031 申请日期 2011.04.12
申请人 DISCO ABRASIVE SYST LTD 发明人 OZAWA NARUTOSHI
分类号 H01L21/301;B24B1/04;B24B41/04 主分类号 H01L21/301
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