摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cutting device which prevents the occurence of scratches and corrosion on a cutting blade attachment surface of a spindle and properly transmits supersonic vibrations to the cutting blade. <P>SOLUTION: A cutting device includes: a chuck table holding a work piece; cutting means having a cutting blade attached to a tip surface of a spindle rotatably driven; supersonic vibration providing means providing supersonic vibrations to the cutting blade; and moving means relatively moving the cutting means and the chuck table. At least the tip surface of the spindle to which the cutting blade is attached is coated by an anti-corrosion agent. <P>COPYRIGHT: (C)2013,JPO&INPIT |