| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator that makes variations in shape of a movable section in manufacturing less than those of conventional ones and can reduce a moment of inertia of the movable section at rotation thereof, and further to provide an optical scanner and an image forming device. <P>SOLUTION: An optical scanner 1 has: a light reflecting portion 211 that has light reflectivity; a movable section 21 that is provided with the light reflecting portion 211, is rotatable about a rotation center axis and has a plate-like shape; coupling sections 23 and 24 that are coupled to the movable section 21 and undergoes torsional deformation accompanying rotation of the movable section 21; and a supporting section 22 for supporting the coupling sections 23 and 24. The movable section 21 has a shape in which a length thereof in a direction parallel to the rotation center axis decreases in a stepwise manner as it separates from the rotation center axis as viewed in a plan view from a plate thickness direction of the movable section 21. The movable section 21, the supporting section 22 and the coupling sections 23 and 24 are formed by performing anisotropic etching on a silicon substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
