| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate a joint surface BL between piezoelectric substrates 2 so that liquid does not leak from the joint surface BL or a driving property does not become uneven by the joint surface BL when composing a liquid injection head 1 in which a plurality of piezoelectric substrates 2 are joined and elongated. <P>SOLUTION: The method for manufacturing the liquid injection head 1 includes: a laminated substrate forming process S1 for joining the piezoelectric substrates 2, each of which includes a plurality of high permittivity materials in which side surfaces adhere to each other, onto a base substrate 3 comprising low permittivity materials to form a laminated substrate 4; a groove forming process S3 for forming a plurality of grooves 7 which are deep enough to reach the base substrate 3 and are arranged in parallel to a longitudinal direction of adhering side surfaces on an upper surface of the laminated substrate 4, and eliminating side surfaces that have adhered when forming the grooves 7; and an electrode forming process 4 for forming driving electrodes on the side surfaces of the grooves. <P>COPYRIGHT: (C)2013,JPO&INPIT |
