| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protection filter device for efficiently removing fine powder in exhaust as the failure factor of a vacuum pump, exhausted from a manufacturing device. <P>SOLUTION: A protection filter device (10) is configured to include: a casing (12) having an internal space (19); an exhaust introduction pipe (14) configured to introduce exhaust (H) containing fine particles into the casing (12); a rotator (16) held so as to be rotatable on a central axial line (CL) of an exhaust introduction pipe (14) in the opening of the exhaust introduction pipe (14) in the casing (12); and an endless belt (18) arranged so as to face the opening of the exhaust introduction pipe (14) via the rotator (16) containing fine particle collection liquid (L) on at least the surface side in the casing (12). The surface of the endless belt (18) is brought into contact with the rotator (16), and according as the endless belt (18) rotates, the rotator (16) rotates, and the fine particle collection liquid (L) on the surface side of the endless belt (18) is applied to the surface of the rotator (16). <P>COPYRIGHT: (C)2013,JPO&INPIT |
