| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a cable connecting inspection probes with each other, a probe holding section and the inspection probes from being damaged. <P>SOLUTION: A substrate inspection apparatus comprises a probing section 3 which allows inspection probes 41 held by probe holding sections 13a and 13b to probe a substrate 100, a control section which controls the probing section 3, an inspection section which executes an electrical inspection on the basis of electric signals inputted/outputted via the inspection probes 41, and a detection section which detects a state where a first distance Lm1 between the inspection probes 41 becomes equal to or more than a first upper limit distance La1 and a state (separated state) where a second distance Lm2 between the inspection probes 41 becomes equal to or more than a second upper limit distance La2. When moving the probe holding sections 13a and 13b along a surface of the substrate 100, the control section controls the probing section 3 on the basis of a result of the separated state detected by the detection section and maintains a state where the first distance Lm1 is less than the first upper limit distance La1 and the second distance Lm2 is less than the second upper limit distance La2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
