| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem of a reduction in precision of analysis due to a reduction in degree of vacuum by outgas generated by a drive motor installed within a vacuum vessel, lubricant oil, a resin-made belt, etc., a problem of deterioration in precision of positioning due to backlash between a pinion and a rack, and a problem of a reduction in resolution of table movement by the use of a pinion and a belt. <P>SOLUTION: By using a spline bearing 14 capable of moving in a Y-axis direction, it is possible to install an X motor 7 together with a Y motor 2 outside a vacuum vessel 30. By using a noncontact type magnetic coupling 24 without backlash as a transmission mechanism of torque and rotational motion between two axes orthogonal to each other in place of a rack&pinion, the precision of positioning is improved. Further, by using an X feed screw 10 in place of a rack&pinion and a belt, resolution is improved. <P>COPYRIGHT: (C)2013,JPO&INPIT |
