| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle frame using a composite body formed by impregnating a carbon fiber with a resin, capable of improving whole rigidity without the need for changing its dimensions, capable of reduction in its weight, and easy to manufacture. <P>SOLUTION: A pellicle frame 10 includes respective sides each having a rectangular shape, formed of slender members 14 and 20 composed of a composite material of a filament-like carbon fiber and a resin. The carbon fiber is oriented in a longitudinal direction of the slender members 14 and 20. Entire surfaces of the slender members 14 and 20 are covered with a resin coating so as to prevent the carbon fiber from being exposed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
