| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deposition apparatus and a deposition method, capable of forming a co-deposited film having a uniform film thickness and a uniform dope concentration on an inner peripheral surface of a cylindrical body. <P>SOLUTION: A deposition apparatus 30 for forming a co-deposited film on an inner peripheral surface of a cylindrical body 1, comprises: a cylindrical body holder 2 for holding the cylindrical body 1; a first deposition container 12 having an inner space for filling a first deposition material 11; and a second deposition container 22 having an inner space for filling a second deposition material 12. The cylindrical body holder 2 and the first and second deposition containers 12 and 22 are movable relatively to each other in a direction in which the cylindrical body 1 extends, and rotatable relatively to each other around a virtual axis line A-A extending in the direction in which the cylindrical body 1 extends. <P>COPYRIGHT: (C)2013,JPO&INPIT |
