摘要 |
<P>PROBLEM TO BE SOLVED: To prevent adhesion of water or oxygen to a connection terminal with a simple constitution, and to prevent formation of an oxide film on the connection terminal. <P>SOLUTION: An electron beam radiation device 100 includes a cathode electrode 174 for emitting thermal electrons, an accelerator 118 for accelerating thermal electrons emitted by the cathode electrode 174 in a vacuum chamber which is maintained in a vacuum condition, a plurality of connection terminals (cathode connection terminals 172) for connecting the cathode electrode 174 with a cathode power source 104, a terminal housing space (A) for housing the plurality of terminals, and removing means (oxidation prevention device 200) for removing water or oxygen from the terminal housing space (A). <P>COPYRIGHT: (C)2013,JPO&INPIT |