| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the load in a management device incident to processing of the monitor data. <P>SOLUTION: The management device in the substrate processing system includes collection means for collecting the monitor data from a substrate processing device, a plurality of temporary storage means for storing the monitor data temporarily, accumulation means for accumulating the monitor data, and monitoring means for monitoring the temporary storage means. The monitoring means monitors the load of the temporary storage means incident to storage of the monitor data, and when the load of the temporary storage means is detected in a state higher than a certain threshold, specifies other temporary storage means of a low load as the destination of storing the monitor data. <P>COPYRIGHT: (C)2013,JPO&INPIT |
