| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a displacement and distortion distribution measurement optical system which is inexpensive and small, and a measurement method thereof. <P>SOLUTION: Plural imaging elements are used to reduce the number of optical elements, which can reduce the size of a device capable of performing a two-dimensional displacement and distortion distribution measurement. Also, a mirror is installed in the vicinity of an object to be measured to reduce the number of the imaging elements, which can further reduce the size of the device. <P>COPYRIGHT: (C)2013,JPO&INPIT |
