发明名称 WASTE LIQUID PROCESSING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a waste liquid processing device capable of returning pure water stored in an ion exchange resin cylinder to a fresh water storage tank when replacing the ion exchange resin cylinder. <P>SOLUTION: In this waste liquid processing device, the ion exchange resin cylinder 63 includes a fresh water supply port to which fresh water supplied from the fresh water storage tank 5 is supplied, and a pure water delivery port for delivering pure water. The waste liquid processing device includes a high pressure air supply means 7 for supplying high pressure air through a pure water delivery port of the ion exchange resin cylinder 63, and a return pipe for communicating the fresh water supply port of the ion exchange resin cylinder 63 with the fresh water storage tank 5. By an operation of the high pressure air supply means 7, high pressure air is supplied to the ion exchange resin cylinder 63 through the pure water delivery port and pure water in the ion exchange resin cylinder 63 is returned from the fresh water supply port to the fresh water storage tank 5 via the return pipe. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012218095(A) 申请公布日期 2012.11.12
申请号 JP20110084804 申请日期 2011.04.06
申请人 DISCO CORP 发明人 MATSUMOTO MASAOMI;HITACHI YOHEI;USHIYAMA KAZUHIKO;HAMA HIDEAKI
分类号 B23Q11/00;B23Q11/10;H01L21/301 主分类号 B23Q11/00
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