WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter capable of accurately extracting light with a desired wavelength, and further to provide an optical module and an electronic apparatus.

SOLUTION: A wavelength variable interference filter 5 comprises: a fixed substrate 51; a movable substrate 52; a fixed reflecting film 54 disposed on a surface opposite to the movable substrate 52 of the fixed substrate 51; a movable reflecting film 55 that is disposed on a surface opposite to the fixed substrate 51 of the movable substrate 52 and is opposite to the fixed reflecting film 54 through a gap G1 between the fixed reflecting film 54 and the movable reflecting film 55; and a fixed electrode 561 disposed on the surface opposite to the movable substrate 52 of the fixed substrate 51. The fixed substrate 51 includes: a reflecting film fixing surface 512A on which the fixed reflecting film 54 is disposed; and a fixed electrode surface 511A on which the fixed electrode 561 is disposed having a distance from the movable substrate 52 different from that of the reflecting film fixing surface 512A. A laminated portion 57 laminated with the fixed reflecting film 54 and the fixed electrode 561 is disposed on the fixed electrode surface 511A having the distance from the movable substrate 52 greater than that of the reflecting film fixed surface 512A.

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