发明名称 SEMICONDUCTOR RESISTOR ELEMENT AND SEMICONDUCTOR MODULE WITH SEMICONDUCTOR RESISTOR ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor resistor element and a semiconductor module with the semiconductor resistor element which can suppress a change in a resistance value of a resistor element layer due to a potential difference between a potential of the resistor element layer and a potential of a semiconductor substrate, power source line, signal line or the like which are disposed around the resistor element layer, without causing useless current and signal distortion or the like. <P>SOLUTION: A resistor element layer 13 is divided into a region 13A as a positive pole region and a region 13B as a negative pole region by the coefficients of resistance variations K1 and K2. The resistor element layer 13 is formed so that a sum of products of index values r1 and r2 using, as an amount, a resistance value from a reference position o to a center position a of the region 13A or a center position b of the region 13B, resistance values R1 and R2, and the coefficients of resistance variations K1 and K2 is zero. That is, the change in the resistance value of the resistor element layer 13 can be suppressed by cancelling a resistance variation component dR1 of the region 13A and a resistance variation component dR2 of the region 13B. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012222302(A) 申请公布日期 2012.11.12
申请号 JP20110089535 申请日期 2011.04.13
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 YAMAMURA TAKESHI
分类号 H01L27/04;H01L21/822 主分类号 H01L27/04
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