摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inductor capable of sensing eddy current within a high temperature region, and an eddy current sensor including the inductor. <P>SOLUTION: An inductor 100 includes a patterned metal layer 102 arranged on an insulating substrate 106. The patterned metal layer 102 is not limited to metal materials and includes any suitable inductive material. The suitable materials for the patterned metal layer 102 include, but are not limited to, platinum, molybdenum, tungsten, tantalum, nickel, titanium, copper, chromium, gold, aluminum, silver or other conductive materials appropriate for the operating temperature. The inductor 100 is capable of sensing eddy current in a temperature range up to about 500°C (932°F). <P>COPYRIGHT: (C)2013,JPO&INPIT |