CMP PAD HAVING AN OVERLAPPING STEPPED GROOVE ARRANGEMENT,申请号KR20050114711-传众专利搜索

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发明名称	CMP PAD HAVING AN OVERLAPPING STEPPED GROOVE ARRANGEMENT
摘要
申请公布号	KR101200424(B1)	申请公布日期	2012.11.12
申请号	KR20050114711	申请日期	2005.11.29
申请人		发明人
分类号	H01L21/304;B24D99/00	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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