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发明名称
Gas injection apparatus and film depositing system having the same
摘要
申请公布号
KR101200357(B1)
申请公布日期
2012.11.12
申请号
KR20070141279
申请日期
2007.12.31
申请人
发明人
分类号
C23C14/24;C23C16/448
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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