| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a barium silicide polycrystal with high density and free from cracks, and to provide a barium gallium silicide sputtering target. <P>SOLUTION: The barium silicide polycrystal, in which the density is ≥3.0 g/cm<SP POS="POST">3</SP>and the maximum diameter of silicon coarse grains existing in the barium silicide polycrystal is ≤150 μm, is produced by using barium and silicon powder with average grain diameter of ≤5 mm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
