SWITCHED CAPACITOR CHARGE PUMP DRIVER FOR PIEZOELECTRIC ACTUATOR

摘要

A switched capacitor charge pump driver for a piezoelectric actuator is provided. The switched capacitor charge pump driver includes a power source, a first capacitor and a piezoelectric actuating circuit. The first capacitor is charged by the power source during a first state and discharged to the piezoelectric actuator in the piezoelectric actuating circuit during a second state. The switched capacitor charge pump driver can expand the application of a charge controller to a broader frequency range, especially at low frequencies, and can effectively decrease the hysteresis of a piezoelectric stack over a large frequency range even at a quasistatic state. A method for driving a piezoelectric actuator by a switched capacitor charge pump is further provided.