发明名称 PROCESS FOR FORMING A CRACK IN A MATERIAL
摘要 <p>The invention relates to a process for forming a semiconductor layer (26) using a substrate (20), called a donor substrate, made of the same semiconductor material, the process comprising: forming a region (22) with a high lithium concentration in said donor substrate, the lithium concentration in said region being between 5×1018 atoms/cm3 and 5×1020 atoms/cm3; next, implanting hydrogen (24) into the donor substrate, in, or in the vicinity of, the region with a high lithium concentration; applying a carrier (19) to the donor substrate; and applying a thermal budget so as to detach the layer (34) defined by the implantation.</p>
申请公布号 WO2012150184(A1) 申请公布日期 2012.11.08
申请号 WO2012EP57713 申请日期 2012.04.27
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;TAUZIN, AURELIE;MAZEN, FREDERIC 发明人 TAUZIN, AURELIE;MAZEN, FREDERIC
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
主权项
地址