| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an Fe-Co based alloy soft magnetic film used for a perpendicular magnetic recording medium or the like, capable of suppressing the formation of a crystal film even in a high temperature range, and a powder sintering sputtering target material for forming the Fe-Co based alloy soft magnetic film. <P>SOLUTION: There is provided an Fe-Co based alloy soft magnetic film for a perpendicular magnetic recording medium in which a film having a thickness of 20 to 300 nm is formed by sputtering a powder sintering target material whose compositional formula in an atomic ratio is expressed by ((Fe<SB POS="POST">X</SB>-Co<SB POS="POST">100-X</SB>)<SB POS="POST">100-Y</SB>-Ni<SB POS="POST">Y</SB>)<SB POS="POST">100-a-b</SB>-M<SB POS="POST">a</SB>-B<SB POS="POST">b</SB>, 10≤X≤70, 0≤Y≤25, 7≤a, 1≤b≤5, and 13≤a+b≤25 and in which the M element in the compositional formula is Nb and/or Ta. <P>COPYRIGHT: (C)2013,JPO&INPIT |
