| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a management device capable of managing data without making a determination based on detection results of a part in which a temporary noise or overshooting occurred. <P>SOLUTION: A management device 500 comprises: measurement data accumulation means 503 for accumulating measurement data transmitted from a substrate processing device 100 which processes a substrate; setting means 511 for setting items of the measurement data to be determined among the measurement data accumulated by the measurement data accumulation means within a predetermined range, reference data which serves as criteria of the measurement data corresponding to the items, and upper and lower limit values of the reference data; counting means 517 for counting the number of times the values of the measurement data corresponding to the items set by the setting means get out of the upper and lower limit values of the reference data set by the setting means; and determination means 518 for determining that the measurement data to be determined is abnormal when the number of times counted by the counting means exceeds a predetermined value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
