| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a solar cell capable of inexpensively manufacturing a solar cell having a passivation film on a rear surface of a substrate and excellent photoelectric conversion efficiency in a simple step. <P>SOLUTION: A manufacturing method of a solar cell includes: a step of forming a passivation film 5 on a surface opposite to a light-receiving surface of a semiconductor substrate 1; a step of providing a plurality of openings 5a on the passivation film; a step of forming an aluminum layer 6a containing an aluminum in the openings 5a; a step of forming a peeling layer 9 containing a metal having a smaller thermal expansion coefficient than the aluminum on the aluminum layer 6a; a step of forming an alloy layer 6 composed of the aluminum layer 6a and the semiconductor substrate 1 by burning the aluminum layer 6a and the peeling layer 9 simultaneously; a step of peeling the peeling layer 9 from the rear surface of the semiconductor substrate 1 by cooling the burnt aluminum layer 6a and the peeling layer 9; and a step of forming a conductive reflection film 7 on the rear surface side of the semiconductor substrate 1 so as to fill the openings 5a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
