| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus and a cleaning method capable of reliably eliminating foreign matters such as cullet sticking to front and rear surfaces of a plate-like member without generating positional displacement of the plate-like member during cleaning. <P>SOLUTION: The cleaning device 1 has a plurality of cleaning means 3a, 3b arranged in a zigzag shape in both sides of the conveying passage respectively so as to hold the front and rear surfaces of the plate-like member 2 during conveying which is a matter to be cleaned and cleans the plate-like member 2 during conveying by rotating the cleaning means 3a, 3b while supplying cleaning liquid to the plate-like member 2. The plurality of cleaning means 3a, 3b include a plurality of sets comprising one cleaning means 3a arranged in one side of the conveying passage and one cleaning means 3b arranged in the other side of the conveying passage so as to face the cleaning means 3a in the same axis, has a cleaning surface in which a plurality of convex parts are continuously arranged in a predetermined interval, and in the cleaning means 3a, 3b constituting the same set, the rotational directions of the cleaning surfaces are opposite directions. <P>COPYRIGHT: (C)2013,JPO&INPIT |
