MULTI-NANOMETER-PROJECTION APPARATUS FOR LITHOGRAPHY, OXIDATION, INSPECTION, AND MEASUREMENT

摘要

An apparatus, method for manufacturing the apparatus, and method for processing a substrate using the apparatus are disclosed. An exemplary apparatus includes a substrate having a plurality of cells, wherein each cell includes a cell structure. The cell structure includes a piezoelectric film portion and a tip disposed over the piezoelectric film portion. The tip is physically coupled with the piezoelectric film portion.