| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a gas treatment unit to have proper gas treatment performance even when the state amount such as a flow rate (flow velocity) and concentration of a gas to be treated fluctuates or changes, and reduce the problems to be caused by excessive or insufficient gas treatment performance. <P>SOLUTION: This gas treatment device includes a state amount detection sensor 19 which detects the state amount of a gas to be treated GS flowing through a duct 1. For example, when the present state amount of the gas GS to be detected by the state amount detection sensor 19, is defined as a flow rate (flow velocity), a control part 18 increases the humidification level of a humidifier 17, if the present flow rate (flow velocity) of the gas GS increases. Meanwhile, the control part 18 decreases the humidification level of the humidifier 17, if the present flow rate (flow velocity) of the gas GS decreases. The concentration of the gas GS may be detected as the state amount of the gas GS. <P>COPYRIGHT: (C)2013,JPO&INPIT |
