| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium capable of attaining much higher recording density while maintaining high perpendicular orientation in a perpendicular magnetic layer. <P>SOLUTION: In a manufacturing method of a magnetic recording medium formed by laminating, at least on a non-magnetic substrate, a soft magnetic underlayer, an orientation controlling layer 11 for controlling the orientation of the layer right above its own, and a perpendicular magnetic layer in which the axis of easy magnetization is oriented in a mainly perpendicular manner relative to the non-magnetic substrate, the perpendicular magnetic layer is made up of two or more magnetic layers. When each layer is subjected to crystal growth so that crystal particles constituting each magnetic layer form columnar crystals continuous in the thickness direction along with crystal particles constituting the orientation controlling layer 11, the orientation controlling layer 11 is formed by CoCr alloy, and further formed as a film using reactive sputtering process in which nitrogen is mixed in sputtering gas. Also, a negative bias voltage is applied to the non-magnetic substrate in forming the film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
