发明名称 |
METHODS AND SUBSTRATES FOR LASER ANNEALING |
摘要 |
Methods and substrates for laser annealing are disclosed. The substrate includes a target region to be annealed and a plurality of reflective interfaces. The reflective interfaces cause energy received by the substrate to resonate within the target region. The method includes emitting energy toward the substrate with a laser, receiving the energy with the substrate, and reflecting the received energy with a plurality of reflective interfaces embedded in the substrate to generate a resonance within the target region.
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申请公布号 |
US2012280273(A1) |
申请公布日期 |
2012.11.08 |
申请号 |
US201113177022 |
申请日期 |
2011.07.06 |
申请人 |
LENCHENKOV VICTOR;MCGRATH R. DANIEL;APTINA IMAGING CORPORATION |
发明人 |
LENCHENKOV VICTOR;MCGRATH R. DANIEL |
分类号 |
H01L29/12;H01L21/268 |
主分类号 |
H01L29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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