| 发明名称 |
METHOD FOR REUSE OF WAFERS FOR GROWTH OF VERTICALLY-ALIGNED WIRE ARRAYS |
| 摘要 |
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
|
| 申请公布号 |
US2012282761(A1) |
申请公布日期 |
2012.11.08 |
| 申请号 |
US201213550395 |
申请日期 |
2012.07.16 |
| 申请人 |
SPURGEON JOSHUA M.;PLASS KATHERINE E.;LEWIS NATHAN S.;ATWATER HARRY A.;THE CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
SPURGEON JOSHUA M.;PLASS KATHERINE E.;LEWIS NATHAN S.;ATWATER HARRY A. |
| 分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
