| 摘要 |
PURPOSE: A light emitting device inspection apparatus is provided to reduce inspection process time by performing an electric inspection process and an optical inspection process for two wafers at the same time. CONSTITUTION: A light emitting device inspection apparatus(100) comprises an electric inspection unit(110), an optical inspection unit(140), a wafer transfer robot(170), and a cassette unit(180). The electric inspection unit performs an electric inspection process for a wafer in which a plurality of light emitting elements is formed. The optical inspection unit performs an optical inspection process for the wafer. The wafer transfer robot is arranged between the electric inspection unit and the optical inspection unit and transfers the wafer. The cassette unit is arranged to be adjacent to the wafer transfer robot and receives a plurality of wafers. |
