| 摘要 |
The invention consists of a measurement device for measuring the force applied by a contact member on the surface of a sample, comprising a vacuum or controlled atmosphere chamber in which there are housed the sample and the contact member, mechanical means for transmitting the force exerted by the contact member in the form of the displacement of one or several flexible members and one or several sensors suitable for measuring said displacement. The device comprises motor-driven linear micropositioners incorporated inside the vacuum or controlled atmosphere chamber for positioning sensor(s). As a result of the system, it is not necessary to break the vacuum to calibrate the sensors, saving time and facilitating the measurement. |
