| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a throughput of a substrate processing device. <P>SOLUTION: A substrate processing device 1 comprises process modules 10A and 10B for executing a series of steps in combination, and a control part 70. When a series of the steps are interrupted by starting conditioning of the process module 10A, the process module 10B becomes in a standby condition. Also, at least provided a second integrated value set in connection with processing of a substrate W in the process module 10B is not less than a setting value N2, counting of a third integrated value is started in the process module 10B. when the third integrated value exceeds a setting value N3, the process module 10B is conditioned. <P>COPYRIGHT: (C)2013,JPO&INPIT |
