| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared sensor which achieve high sensitivity by cancelling a substantial difference between temperature of the infrared sensor and temperature detected by a temperature sensor, and to provide an NDIR gas densitometer using the infrared sensor. <P>SOLUTION: An infrared sensor 1 includes: an optical filter 2 which allows, among light beams incident from an opening section 51, only an infrared ray of a predetermined wavelength to pass therethrough to a downstream side; and an infrared sensor element 3 which includes a photoelectric conversion portion 32 that photoelectrically converts the infrared ray passed through the optical filter so as to output it as an electric signal. In the infrared sensor, a temperature sensor for measuring temperature of the infrared sensor element is configured to be thermally integrated with the infrared sensor element and is sealed with a resin sealing portion 5. The infrared sensor 1 further includes: a signal processing IC4 which corrects, based on temperature obtained by the temperature sensor, the electric signal output from the photoelectric conversion portion; and a connection terminal connected to the signal processing IC. The signal processing IC includes the temperature sensor. The connection terminal and the infrared sensor element are stacked so as to be connected via bump connection. <P>COPYRIGHT: (C)2013,JPO&INPIT |
