| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece holding device capable of preventing a workpiece from having defects such as scratches and cracks when holding the workpiece such as a deformed substrate. <P>SOLUTION: The workpiece holding device 20 includes a chucking mechanism 40 having a pair of chucking pieces 41 and 42 for chucking the workpiece W, and a chucking mechanism support 30 supporting the chucking mechanism 40. At least one chucking piece 41 (or 42) of the pair of chucking pieces 41 and 42 can approach and can be spaced from the mutually-facing chucking piece 42 (or 41), and the device is provided with a spacing regulating means 50 for regulating a spacing range of the one chucking piece 41 (or 42). <P>COPYRIGHT: (C)2013,JPO&INPIT |
