| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater which can reduce heating time and also has improved durability. <P>SOLUTION: A ceramic heater 1 comprises: a ceramic substrate 2; and a heating resistor 3 which is embedded in the ceramic substrate 2 and generates heat when a current is applied thereto. On its external surface, the ceramic substrate 2 includes: a rough surface region 4a with high surface roughness; and a smooth surface region 4b with surface roughness lower than that of the rough surface region 4a. Consequently, the flow of a fluid, which is a heating object, can be disturbed in a contact region between the ceramic heater 1 and the fluid so that the heat exchange efficiency on the external surface of the ceramic substrate 2 is improved to thereby reduce heating time. Further, local temperature rise due to nucleate boiling, film boiling and the like is suppressed by disturbing the fluid flow so that the cracking, etc. of the ceramic substrate 2 can be prevented. <P>COPYRIGHT: (C)2013,JPO&INPIT |
