| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing metal foil with an electric resistance layer, in which a sheet resistance value is high and the influence of variation is low in the resistance value caused by manufacturing processing upon production of a resistive element. <P>SOLUTION: The method for manufacturing the metal foil with the electric resistance layer includes a step of forming the electric resistance layer by vapor growth method while applying oxygen as an atmosphere gas, on the metal foil having a surface where the average roughness of ten points measured by an optical method is adjusted to 4.0 to 6.0 μm, using a sputtering target containing nickel, chromium, and silicon. <P>COPYRIGHT: (C)2013,JPO&INPIT |
