OSCILLATION DEVICE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an oscillation device that has a lower mechanical quality factor Q when compared to a case in which a diaphragm includes only metal films and that prevents a decrease in vibration amplitude.

SOLUTION: A piezoelectric element 20 is provided on a diaphragm 10. A support member 40 holds an edge of the diaphragm 10. The diaphragm 10 has a first film 12, a second film 14, and a third film 16. The first film 12 includes metal. The second film 14 includes a material that has lower rigidity than the metal included in the first film 12. The third film 16 includes a material that has higher internal loss than the metal included in the first film 12 and that has lower rigidity than the material included in the second film 14.

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